JPH0574182B2 - - Google Patents
Info
- Publication number
- JPH0574182B2 JPH0574182B2 JP59046172A JP4617284A JPH0574182B2 JP H0574182 B2 JPH0574182 B2 JP H0574182B2 JP 59046172 A JP59046172 A JP 59046172A JP 4617284 A JP4617284 A JP 4617284A JP H0574182 B2 JPH0574182 B2 JP H0574182B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- analysis
- exchange pipe
- preliminary
- rod
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Sampling And Sample Adjustment (AREA)
- Electron Tubes For Measurement (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59046172A JPS60189853A (ja) | 1984-03-10 | 1984-03-10 | 試料交換装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59046172A JPS60189853A (ja) | 1984-03-10 | 1984-03-10 | 試料交換装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60189853A JPS60189853A (ja) | 1985-09-27 |
JPH0574182B2 true JPH0574182B2 (en]) | 1993-10-15 |
Family
ID=12739603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59046172A Granted JPS60189853A (ja) | 1984-03-10 | 1984-03-10 | 試料交換装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60189853A (en]) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5032076B2 (ja) * | 2006-09-12 | 2012-09-26 | 株式会社テクノフロント | 質量分析装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53161686U (en]) * | 1977-05-20 | 1978-12-18 | ||
JPS57138758A (en) * | 1981-02-20 | 1982-08-27 | Nippon Telegr & Teleph Corp <Ntt> | Sample exchange device |
-
1984
- 1984-03-10 JP JP59046172A patent/JPS60189853A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60189853A (ja) | 1985-09-27 |
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